JPH0143809Y2 - - Google Patents

Info

Publication number
JPH0143809Y2
JPH0143809Y2 JP18387381U JP18387381U JPH0143809Y2 JP H0143809 Y2 JPH0143809 Y2 JP H0143809Y2 JP 18387381 U JP18387381 U JP 18387381U JP 18387381 U JP18387381 U JP 18387381U JP H0143809 Y2 JPH0143809 Y2 JP H0143809Y2
Authority
JP
Japan
Prior art keywords
electron
current
emission surface
emitting surface
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18387381U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5887253U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18387381U priority Critical patent/JPS5887253U/ja
Publication of JPS5887253U publication Critical patent/JPS5887253U/ja
Application granted granted Critical
Publication of JPH0143809Y2 publication Critical patent/JPH0143809Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP18387381U 1981-12-10 1981-12-10 電子ビ−ム源 Granted JPS5887253U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18387381U JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18387381U JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Publications (2)

Publication Number Publication Date
JPS5887253U JPS5887253U (ja) 1983-06-13
JPH0143809Y2 true JPH0143809Y2 (en]) 1989-12-19

Family

ID=29983522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18387381U Granted JPS5887253U (ja) 1981-12-10 1981-12-10 電子ビ−ム源

Country Status (1)

Country Link
JP (1) JPS5887253U (en])

Also Published As

Publication number Publication date
JPS5887253U (ja) 1983-06-13

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